Levitation Micro-Systems
Applications to Sensors and ActuatorsThis book presents inductive and hybrid levitation micro-systems and their applications in micro-sensors and ‘actuators. It proposes and discusses analytical and quasi-finite element techniques for modeling levitation micro-systems based on the Lagrangian formalism. In particular, micro-bearings, -actuators, -accelerators and ‘accelerometers based on inductive levitation are comprehensively described with accompanying experimental measurements. ISBN: 9783030589073, 3030589072
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